Flow regime map and deposition rate uniformity in vertical rotating-disk OMVPE reactors

✍ Scribed by Catharina R. Biber; Christine A. Wang; Shahryar Motakef

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 842 KB
• Volume: 123
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(92)90616-q