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Flow mode transition and its effects on crystal—melt interface shape and oxygen distribution for Czochralski-grown Si single crystals

✍ Scribed by Masahito Watanabe; Minoru Eguchi; Koichi Kakimoto; Haruhiko Ono; Shigeru Kimura; Taketoshi Hibiya


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
413 KB
Volume
151
Category
Article
ISSN
0022-0248

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