Fabrication and characterization of ITO
Fabrication and characterization of ITO thin films on heat-resistant transparent flexible clay films
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Hiroyuki Tetsuka; Takeo Ebina; Tatsuo Tsunoda; Hiroshi Nanjo; Fujio Mizukami
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Article
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2008
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Elsevier Science
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English
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Transparent conductive indium tin oxide (ITO) thin films were deposited on transparent flexible clay films with heat resistant and high gas barrier properties by rf magnetron sputtering. The electrical, structural, and optical properties of these films were examined as a function of deposition tempe