Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators

✍ Scribed by Flavio Pardo; R.A. Cirelli; E.J. Ferry; W.Y.-C. Lai; F.P. Klemens; J.F. Miner; C.S. Pai; J.E. Bower; W.M. Mansfield; A. Kornblit; T.W. Sorsch; J.A. Taylor; M.R. Baker; R. Fullowan; M.E. Simon; V.A. Aksyuk; R. Ryf; H. Dyson; S. Arney

• Book ID: 108207714
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 1003 KB
• Volume: 84
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.01.099