Flash-evaporated TiNiCu thick film for shape memory alloy micro actuator

✍ Scribed by Takashi Mineta; Kouji Kasai; Yuki Sasaki; Eiji Makino; Takahiro Kawashima; Takayuki Shibata

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 467 KB
• Volume: 86
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2008.12.032