Fixed polarizer, rotating-polarizer and fixed analyzer spectroscopic ellipsometer: accurate calibration method, effect of errors and testing

✍ Scribed by A. En Naciri; L. Broch; L. Johann; R. Kleim

• Book ID: 108388358
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 317 KB
• Volume: 406
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(01)01777-1