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First steps towards the fabrication of electrostatic micromotors using SOG

✍ Scribed by V. Conédéra; N. Fabre; H. Camon; B. Rousset; H.H. Pham; C. Solano


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
417 KB
Volume
46
Category
Article
ISSN
0924-4247

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