✦ LIBER ✦
First results on silicon carbide vapour phase epitaxy growth in a new type of vertical low pressure chemical vapour deposition reactor
✍ Scribed by R. Rupp; P. Lanig; J. Völkl; D. Stephani
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 327 KB
- Volume
- 146
- Category
- Article
- ISSN
- 0022-0248
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