Finite element simulation of the effect of surface roughness on nanoindentation of thin films with spherical indenters
β Scribed by C. Walter; T. Antretter; R. Daniel; C. Mitterer
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 440 KB
- Volume
- 202
- Category
- Article
- ISSN
- 0257-8972
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π SIMILAR VOLUMES
Rough surface formation in thin films during annealing occurs with several materials. Increased roughness of an aluminum (Al) thin film surface can lead to electrical shorts, which are a significant problem for interconnections in liquid-crystal displays. Surface roughness can be decreased by adding
The present study aims to challenge the existing finite element models in terms of one of the most important practical parameters, i.e. coverage. Important models from the literature are re-simulated and their resulted treated surfaces are carefully examined. Result of this study shows that existing