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Finite-Element Simulation of Micro-Electromechanical Systems (MEMS) by Strongly Coupled Electromechanical Transducers

✍ Scribed by Gyimesi, M.; Avdeev, I.; Ostergaard, D.

Book ID: 118142639
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 193 KB
Volume: 40
Category: Article
ISSN: 0018-9464
DOI: 10.1109/tmag.2004.824592

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