Finite element simulation and experimental study on the through-mask electrochemical micromachining (EMM) process

✍ Scribed by Wang Li; Wang Quandai; Hao Xiuqing; Ding Yucheng; Lu Bingheng

• Book ID: 105853749
• Publisher: Springer
• Year: 2010
• Tongue: English
• Weight: 897 KB
• Volume: 51
• Category: Article
• ISSN: 0268-3768
• DOI: 10.1007/s00170-010-2610-x