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Finite-element modeling of the transient response of MEMS sensors

✍ Scribed by Lim, Young-Hun; Varadan, Vasundara V; Varadan, Vijay K


Book ID
118142479
Publisher
Institute of Physics
Year
1997
Tongue
English
Weight
283 KB
Volume
6
Category
Article
ISSN
0964-1726

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