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Finite-element modeling of nanoindentation for determining the mechanical properties of implanted layers and thin films

✍ Scribed by J.A. Knapp; D.M. Follstaedt; J.C. Barbour; S.M. Myers

Book ID
114169067
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
536 KB
Volume
127-128
Category
Article
ISSN
0168-583X

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Effects of the substrate on the determin
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We examine the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation. The properties of aluminum and tungsten films on the following substrates have been studied: aluminum, glass, silicon and sapphire. By studying both soft films on hard substrates a