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Finite element modeling of hydrostatic stress distribution in copper dual-damascene interconnects

✍ Scribed by Guang-jie Yuan; Leng Chen

Book ID: 107623934
Publisher: Chinese Electronic Periodical Services
Year: 2011
Tongue: English
Weight: 600 KB
Volume: 16
Category: Article
ISSN: 1007-1172
DOI: 10.1007/s12204-011-1148-x

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