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Finite element method analysis and control of micro actuator with piezoelectric element for spinstand

✍ Scribed by Akihiro Naganawa; Shigeki Mori; Hirohiko Tada; Yotsugi Shibuya; Goro Obinata; Kazuhiro Ouchi

Publisher: Springer-Verlag
Year: 2005
Tongue: English
Weight: 369 KB
Volume: 11
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-005-0530-8

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