Electric force microscope (EFM) testing is based on the non-linear Coulomb force interaction between a conducting EFM probe and a test point located on the conducting line of an integrated circuit (IC). It has been reported as a new and most promising testing system for IC internal contactless diagn
โฆ LIBER โฆ
Finite difference simulation of electric force microscope measurements
โ Scribed by U. Mueller; S. Hofschen; C. Boehm; J. Sprengepiel; E. Kubalek; A. Beyer
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 395 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.
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