Fine-tuned profile simulation of holographically exposed photoresist gratings

✍ Scribed by Ch Zanke; A Gombert; A Erdmann; M Weiss

• Book ID: 108363061
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 815 KB
• Volume: 154
• Category: Article
• ISSN: 0030-4018
• DOI: 10.1016/s0030-4018(98)00252-1