𝔖 Bobbio Scriptorium
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Fine particles synthesis in excimer laser assisted decomposition of tetraethylorthosilicate vapour

✍ Scribed by Jiří Smolík; Pavel Moravec; Pavel Kubát

Book ID
104678958
Publisher
Springer
Year
1996
Tongue
English
Weight
229 KB
Volume
15
Category
Article
ISSN
0261-8028

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We have deposited tungsten on silicon from WF 6 and H 2 by laser-assisted chemical vapour deposition. An ArF excimer laser was aligned parallel to the substrate. The deposition experiments were performed to investigate reactions between WF 6 and the silicon substrate. We investigated the roughness a