𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Fine ceramic precision ball screws


Publisher
Elsevier Science
Year
1987
Weight
120 KB
Volume
8
Category
Article
ISSN
0261-3069

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Adaptive sliding mode control of a high-
✍ Her-Terng Yau; Jun-Juh Yan πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 734 KB

High-precision position control has been widely used in scientific instruments and semiconductor fabrication equipment. Traditionally, controllable displacements with sub-micron and nano-level resolution are usually achieved by piezoelectric actuators because of their high bandwidth and ease of cont