Adaptive sliding mode control of a high-
β
Her-Terng Yau; Jun-Juh Yan
π
Article
π
2009
π
Elsevier Science
π
English
β 734 KB
High-precision position control has been widely used in scientific instruments and semiconductor fabrication equipment. Traditionally, controllable displacements with sub-micron and nano-level resolution are usually achieved by piezoelectric actuators because of their high bandwidth and ease of cont