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Film-type In2O3 gas sensor

โœ Scribed by Yoshikazu Yasukawa; Takakazu Seki; Jun-ichi Muramatsu; Shigehumi Sugie; Shigeru Tasaka; Norihiro Inagaki


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
109 KB
Volume
14
Category
Article
ISSN
0925-4005

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This paper describes the fabrication procedure as well as the sensing properties of new hydrogen sensors using Fe,Os-based thin film. The tilm is deposited by the rf. sputtering technique; its composition is FeaO, TiOr(5 mol%) and MgO(O-12 mol%). The conductance change of the tilm is examined in var