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Film modification by low energy ion bombardment during deposition

✍ Scribed by S.M. Rossnagel; J.J. Cuomo

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 823 KB
Volume: 171
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(89)90040-0

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