Film and interface properties of epitaxial metal/insulator/semiconductor systems formed by ionized cluster beam deposition

✍ Scribed by I. Yamada; H. Usui; H. Inokawa; T. Takagi

• Publisher: Elsevier Science
• Year: 1986
• Weight: 43 KB
• Volume: 168
• Category: Article
• ISSN: 0167-2584
• DOI: 10.1016/0167-2584(86)90456-1