✦ LIBER ✦
Filling of micron-sized contact holes with copper by energetic cluster impact
✍ Scribed by H. Haberland
- Book ID
- 126491566
- Publisher
- AVS (American Vacuum Society)
- Year
- 1994
- Tongue
- English
- Weight
- 979 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0734-2101
- DOI
- 10.1116/1.578967
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