✦ LIBER ✦
Fieldstitching with Kirchhoff-boundaries as a model based description for line edge roughness (LER) in scatterometry
✍ Scribed by Thomas Schuster; Stephan Rafler; Valeriano Ferreras Paz; Karsten Frenner; Wolfgang Osten
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 202 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.
✦ Synopsis
Optical scatterometry has established itself as one of the mainly applied methods for CD metrology besides CD-SEM during the recent years. However, grating imperfections such as line edge roughness have been largely neglected in scatterometry models so far. Since imperfections of the perfect periodicity would yield large unit cells in a fully rigorous computation of the scatterograms an approximative method has to be used instead. To that end we propose a fieldstitching method which introduces virtual lateral Kirchhoff-boundaries.