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Field Emission from Silicon Implanted with Carbon and Nitrogen Followed by Electron Beam Annealing

✍ Scribed by D.A. Carder; A. Markwitz; J. Kennedy

Book ID: 107456911
Publisher: Springer US
Year: 2010
Tongue: English
Weight: 388 KB
Volume: 39
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-010-1224-2

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