✦ LIBER ✦
Field effect of fixed negative charges on oxidized silicon induced by AlF3 layers with fluorine deficiency
✍ Scribed by D König; D.R.T Zahn; G Ebest
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 285 KB
- Volume
- 234
- Category
- Article
- ISSN
- 0169-4332
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