Fiber-optic displacement sensor with 0.02 μm resolution by white-light interferometry

✍ Scribed by Andreas Koch; Reinhard Ulrich

• Book ID: 108028032
• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 604 KB
• Volume: 25
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(90)87032-e