Femtosecond transient reflectivity measurements as a probe for process-induced defects in silicon

✍ Scribed by A. Esser; W. Kütt; M. Strahnen; G. Maidorn; H. Kurz

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 408 KB
• Volume: 46
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(90)90187-5