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Feedback-Linearized Inverse Feedforward for Creep, Hysteresis, and Vibration Compensation in AFM Piezoactuators

✍ Scribed by Leang, Kam K.; Devasia, Santosh


Book ID
119967204
Publisher
IEEE
Year
2007
Tongue
English
Weight
953 KB
Volume
15
Category
Article
ISSN
1063-6536

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