Features of distribution of oxygen in silicon single crystals at excentric growth by the Czochralski method. (USSR): B M Turovskiy, Neorg Mater, 11 (4), 1975, 589–591 (in Russian)
- Publisher
- Elsevier Science
- Year
- 1976
- Tongue
- English
- Weight
- 145 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0042-207X
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✦ Synopsis
New SEM-Auger microanalyzer with U HV capability. (USA) The design and performance of a new Auger microanalyzer (EMAS) with the capability of UHV scanning electron microscope (SEM) is described. The incident electron beam is focused by a magnetic lens system, and the spatial resolution is below 0.5 txm for the Auger analysis mode and on the order of 100/~ in the SEM mode. Possible modes of analysis include point analysis, line analysis, and Auger image mapping, in addition to secondary electron and absorbed current imaging. The depth profiling of chemical composition in submicron structures is also provided by use of ion beam etching. An air-locked sample changer is employed to keep the vacuum of the system at 10 -7 Pa during specimen loading and unloading. Three examples of applications to microclectronics devices are presented. (Japan) T lshida etal,