✦ LIBER ✦
Feature length-scale modeling of LPCVD and PECVD MEMS fabrication processes
✍ Scribed by Lawrence C. Musson; Pauline Ho; Steven J. Plimpton; Rodney C. Schmidt
- Publisher
- Springer-Verlag
- Year
- 2005
- Tongue
- English
- Weight
- 390 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0946-7076
No coin nor oath required. For personal study only.