Feature Article: Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials

✍ Scribed by Niinist�, L. ;P�iv�saari, J. ;Niinist�, J. ;Putkonen, M. ;Nieminen, M.

• Publisher: John Wiley and Sons
• Year: 2004
• Tongue: English
• Weight: 180 KB
• Volume: 201
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.200490011