✦ LIBER ✦
Feasibility study of CARL DUV-positive resist for 30-kV electron beam application and status of further resist development
✍ Scribed by O Kirch; K Elian; K Seibold
- Book ID
- 114155307
- Publisher
- Elsevier Science
- Year
- 2001
- Tongue
- English
- Weight
- 579 KB
- Volume
- 57-58
- Category
- Article
- ISSN
- 0167-9317
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