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Feasibility of using vanadium to form damascene structures with an air gap

✍ Scribed by H. Gin Nam; Myungsub Shin; Nam-Ihn Cho; Eui-Jung Yun

Book ID: 108079057
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 266 KB
Volume: 7
Category: Article
ISSN: 1567-1739
DOI: 10.1016/j.cap.2007.03.002

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