𝔖 Bobbio Scriptorium
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Fast target heating system for ion implantation

✍ Scribed by H. Kräutle


Book ID
107833767
Publisher
Elsevier Science
Year
1981
Weight
251 KB
Volume
189
Category
Article
ISSN
0167-5087

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The temperature of the substrate has strong influence on the diffusion coefficient of nitrogen ions during plasma immersion ion implantation (PIII) performed in metallic surfaces, which affect the ion implantation profiles and can lead to the formation of thick implanted layers. In order to heat con