A new high-temperature plasma immersion
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R.M. Oliveira; J.A.N. Gonçalves; M. Ueda; J.O. Rossi; P.N. Rizzo
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Article
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2010
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Elsevier Science
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English
⚖ 566 KB
The temperature of the substrate has strong influence on the diffusion coefficient of nitrogen ions during plasma immersion ion implantation (PIII) performed in metallic surfaces, which affect the ion implantation profiles and can lead to the formation of thick implanted layers. In order to heat con