Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam

✍ Scribed by Shinozaki, Ryo ;Sasaki, Osami ;Suzuki, Takamasa

• Book ID: 115351586
• Publisher: The Optical Society
• Year: 2004
• Tongue: English
• Weight: 143 KB
• Volume: 43
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.43.004157