𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Fast response characteristics of hydrogen sensors based on Pd nanoparticle films with controlled coverage

✍ Scribed by Bo Xie, Mengyang Zheng, Fei Liu, Xing Peng…


Book ID
120753514
Publisher
Springer Netherlands
Year
2013
Tongue
English
Weight
685 KB
Volume
15
Category
Article
ISSN
1388-0764

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


MOS hydrogen sensor with very fast respo
✍ Chi Lu; Zhi Chen 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 702 KB

Ultra-thin thermal SiO 2 film ## Response time SiO 2 bulk trap a b s t r a c t An MOS capacitor-type hydrogen gas sensor was fabricated with the structure of Ni/SiO 2 /Si by using conventional silicon wafer technologies. Grown by dry oxidation at 900 C, the thickness of the SiO 2 film was only 24