MOS hydrogen sensor with very fast respo
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Chi Lu; Zhi Chen
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Article
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2010
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Elsevier Science
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English
⚖ 702 KB
Ultra-thin thermal SiO 2 film ## Response time SiO 2 bulk trap a b s t r a c t An MOS capacitor-type hydrogen gas sensor was fabricated with the structure of Ni/SiO 2 /Si by using conventional silicon wafer technologies. Grown by dry oxidation at 900 C, the thickness of the SiO 2 film was only 24