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Fast replication of out-of-plane microlens with polydimethylsiloxane and curable polymer (NOA73)

✍ Scribed by Guocheng Shao; Weiping Qiu; Wanjun Wang

Book ID: 106185877
Publisher: Springer-Verlag
Year: 2010
Tongue: English
Weight: 509 KB
Volume: 16
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-009-1010-3

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