✦ LIBER ✦
Fast, reliable mechanical probing of submicron features A new tool that combines gas-assisted FIB and mechanical probing
✍ Scribed by James Brown; Mark DeSilets; Doug Masnaghetti; Christopher G. Talbot
- Book ID
- 103599624
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 467 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0167-9317
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