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Fast mixed modeling of doping for statistical process/device simulation

โœ Scribed by Andrzej Pfitzner; Adam Lejman

Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
252 KB
Volume
6
Category
Article
ISSN
1369-8001

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โœฆ Synopsis

A hybrid method of diffusion process modeling has been developed for statistical simulation purpose. This mixed modeling approach combines numerical solutions with especially fitted analytical approximations. The numerical solutions are used as reference data to create semi-empirical approximations. This analytical model is used in the Monte-Carlo loop. Thus, high accuracy and good computational efficiency can be obtained. An application of the hybrid approach to post-implantation annealing is presented in the paper.

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