Fast imaging algorithm for DMD-based photolithography with partially coherent illumination

✍ Scribed by Shi, Zhaojun; Gao, Yiqing

• Book ID: 118453425
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 570 KB
• Volume: 123
• Category: Article
• ISSN: 0030-4026
• DOI: 10.1016/j.ijleo.2011.08.057