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Fast current pulse m.o.s. deep-depletion technique for profiling thin epitaxial and ion-implanted layers : P. H. Ladbrooke, R. S. Huang and J. A. Barnard, Solid-St. Electron Devices2, (4) 104 (July 1978)


Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
64 KB
Volume
18
Category
Article
ISSN
0026-2714

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