✦ LIBER ✦
Fast computation of constructive and destructive interference areas in partially coherent imaging for resolution enhancement in optical microlithography
✍ Scribed by Yamazoe, Kenji ;Sekine, Yoshiyuki ;Honda, Tokuyuki
- Book ID
- 115354272
- Publisher
- The Optical Society
- Year
- 2009
- Tongue
- English
- Weight
- 719 KB
- Volume
- 48
- Category
- Article
- ISSN
- 1559-128X
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