✦ LIBER ✦
Fast and rigorous use of thermal time constant to characterize back end of the line test structure in advanced technology
✍ Scribed by Reverdy, A.; Perdu, P.; Murray, H.; de la Bardonnie, M.; Poirier, P.
- Book ID
- 108210779
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 873 KB
- Volume
- 48
- Category
- Article
- ISSN
- 0026-2714
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