✦ LIBER ✦
Fast and accurate X-ray lithography simulation enabled by using Monte Carlo method. New version of DoseSim: a software dedicated to deep X-ray lithography (LIGA)
✍ Scribed by Pascal Meyer
- Book ID
- 118787817
- Publisher
- Springer-Verlag
- Year
- 2012
- Tongue
- English
- Weight
- 934 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0946-7076
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