Failure analysis of integrated circuits beyond the diffraction limit: contact mode near-field scanning optical microscopy with integrated resistance, capacitance, and UV confocal imaging

✍ Scribed by Lewis, A.; Shambrot, E.; Radko, A.; Lieberman, K.; Ezekiel, S.; Veinger, D.; Yampolski, G.

• Book ID: 119782032
• Publisher: IEEE
• Year: 2000
• Tongue: English
• Weight: 738 KB
• Volume: 88
• Category: Article
• ISSN: 0018-9219
• DOI: 10.1109/5.883318