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Factors driving c-axis orientation and disorientation of LiNbO3 thin films deposited on TiN and indium tin oxide by electron cyclotron resonance plasma sputtering

✍ Scribed by Akazawa, H.; Shimada, M.


Book ID
111675461
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
883 KB
Volume
99
Category
Article
ISSN
0021-8979

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