✦ LIBER ✦
Factors controlling the etching rate and etching profile in the O2 reactive ion etching pattern transfer step in multilevel lithography
✍ Scribed by Charles W. Jurgensen; Eric S. G. Shaqfeh
- Publisher
- Society for Plastic Engineers
- Year
- 1989
- Tongue
- English
- Weight
- 403 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0032-3888
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