✦ LIBER ✦
Factorial experimental design applied to DRIE for optimised process in power electronics applications requiring high-aspect ratio trenches
✍ Scribed by Magali Brunet; Pascal Dubreuil; Hicham Mahfoz-Kotb; Aline Gouantes; Anne-Marie Dorthe
- Book ID
- 106185768
- Publisher
- Springer-Verlag
- Year
- 2009
- Tongue
- English
- Weight
- 385 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0946-7076
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