✦ LIBER ✦
Facile fabrication of sub-20-nm nanochannels based on crystallinity-dependent anisotropic etching of silicon
✍ Scribed by Song, Youngsup; Kim, Min-Ook; Kwon, Dae-sung; Kim, Yong-Jun; Kim, Jongbaeg
- Book ID
- 121916595
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 659 KB
- Volume
- 98
- Category
- Article
- ISSN
- 0167-9317
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